Wafer Probe station Test Handler Bonder Die probe station AOI testing equipment Exposure machine Sorter
Wafer Intelligent Optical Inspection System
AG-30
Wafer Intelligent Optical Inspection System
In-depth understanding of product processes and inspection standards; multi-channel light composite inspection.
AG-30
Wafer Intelligent Optical Inspection System
Designed for discrete device wafers, this system supports surface defect inspection both before and after dicing.
Critical Dimension Precision Measurement System
AH-30
Critical Dimension Precision Measurement System
The industry's first fully automatic, high-precision, and high-throughput measurement system for trench dimensions.
AH-30
Critical Dimension Precision Measurement System
Designed for critical dimension metrology on wafers, supporting both planar (2D) and height (3D) measurements.
Optical chips AI defect inspection system
AX-50
Optical chips AI defect inspection system
Successfully deployed and proven at leading domestic optical communication customers.
AX-50
Optical chips AI defect inspection system
Designed for sub-micron defect inspection on the surface of optical chips, such as PD and VCSEL.
Optical chips Multi-Side AI Detection system
AR-70
Optical chips Multi-Side AI Detection system
Utilizes multi-depth fusion technology to automatically adapt to posture variations during the chip inspection process.
AR-70
Optical chips Multi-Side AI Detection system
Supports parallel inspection of the P-side, N-side, AR-side, and HR-side of DFB and EML chips.
Patterned wafer AI Optical Inspection System
AX-90
Patterned wafer AI Optical Inspection System
Meets high-end automotive-grade qualification standards; 100% AI-powered inspection.
AX-90
Patterned wafer AI Optical Inspection System
Suitable for surface defect inspection of 8" to 12" patterned wafers, supporting both pre-dicing and post-dicing inspection.
Atomic Force Auto Measurement System
AT-1000
Atomic Force Auto Measurement System
Based on sub-micron optical scanning inspection, enabling automated AFM spot selection and measurement.
AT-1000
Atomic Force Auto Measurement System
Suitable for nanoscale critical dimension metrology, supporting measurements such as linewidth and height.
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